AE ADVANCED ENERGY APEX 1513 RF GENERATOR 3156110
AE Advanced Energy APEX 1513 RF Generator 3156110-114
ETCH 1.5kW 13.56MHz 374V POWER-DELIVERY SYSTEM AMAT 660-032596-014, 660-032596-023. Advanced Energy AE APEX 1513 RF Generator includes:
Advanced Energy AE APEX 1513 RF Power Generator 3156110-114 repair, refurbish, buy and sell.
Advanced Energy AE APEX 1513 RF Power Generator 3156110-005 repair, refurbish, buy and sell.
Unit Specifications –
Brand/Make: Advanced Energy (AE).
AE Model No.: Apex 1513 RF generator.
AE Part No.: 3156110-114, 3156110-005.
AMAT Part No. P/N includes 660-032596-014, 660-032596-023.
Category: Power Supply RF and Plasma Generators.
Type: RF Generator/ RF Power-Delivery System.
Frequency range: 13.56MHz.
Output: 1.5kW @ 13.56MHz .
AE ADVANCED ENERGY APEX 1513 RF GENERATOR 3156110-114 RF Power Generator is working. It was tested in our facility and is fully functional. The physical condition is good.
Product Specifications –
Advanced Energy Apex RF Power-Delivery Systems. The Apex platform delivers superb performance in plasma-based thin-film processes for semiconductor, flat panel display, or data storage manufacturing.
The versatile Apex family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process
reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based, thin-film processes for semiconductor, flat panel display, or data storage manufacturing.
Benefits:
Higher power density. Improved process flexibility. Increased yield. Simplified process tool integration. Flexible communications.
Repair & Refurbish RF power generator –
We repair RF match MFA, cable assemblies, and all Advanced Energy RF power supply generator series includes –
All AE Paramount series repair such as AE Paramount 3013 repair, Paramount 1513 repair, Paramount 6013 repair.
All AE RFDS series repair, all AE RFG series repair such as AE RFG 1250, AE RFG 1251, AE RFG 2000-2V, AE RFG 3000, AE RFG 3001, RFG 3002, AE RFG 5500 repair.
All AE CESAR series repair such as AE CESAR Dressler 1310 repair, CESAR 136 repair, AE CESAR 0210 repair, CESAR 0220 repair. AMAT applied materials repair.
All AE PE II series repair such as AE PE II 10K repair, AE PE II 5K repair, AE PE-1000 repair.
All AE PDX series repair such as PDX 1400 repair, PDX 900-2V repair, AE PDX 5000 repair.
Buy and Sell –
We buy, sell and supply refurbished Semicon items and certified working units to worldwide customers.
Testing –
After repair and refurbish in our facilities, testing will be carried out. Test report will be generated to prove that the item is working and in good condition. Item will be certified working. We provide top quality and value for money Semicon items.
Shipping –
We service customers worldwide and ship worldwide. Please email us for a repair and shipping quote.
Warranty –
Warranty can be discussed.
Higher Cost Savings –
Through repairs, we help our customers achieve higher cost savings for Semicon components such as RF Matching Network MFA, AE RF generator, Altronic water-cooled dummy load, RF power supply, RF cable assemblies with connectors.
Good Reliability
We are established and reliable as we have 15 years of experience in the Semiconductor industry. We use top-quality products, mostly made-in-USA. Feel free to email us for Free consultation. PALrepair.com Singapore
